Floor vibration assessment of semiconductor manufacturing facility
NV Dynamics is engaged by a prominent precision components manufacturer to assess existing floor vibration levels at the newly built 25,000 sq.mt manufacturing facility. It was understood from the client that multiple vibration sensitive electronic equipment such as PCB board manufacturing equipment, radiography equipment, and many such equipment will be installed within this facility. As such, quantifying the existing vibration amplitudes and respective frequencies was crucial.
A total of 80 locations of assessment were identified by the client based on the sensitivity of the upcoming equipment. Vibration assessments were conducted using tri-axial ultra-low frequency vibration transducers (seismic grade) and were directly coupled to the floor under consideration. Vibration measurements were conducted in orthogonal directions (X, Y & Z) at each of the identified locations. The vibration transducers were then connected to a multi-channel data acquisition system and were configured to record the vibration data for about 10 minutes at each location.
Data processing included the conversion of vibration acceleration data into vibration velocity in the form of 1/3rd octave band graphs. A bandwidth of 8-100 Hz was considered for processing the data. The obtained data was then compared against internationally accepted vibration criteria curves, which represent the permissible limit for proposed vibration sensitive equipment.
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